Table 1 Doping levels of Ti and Ru, crystallite size, resistivity, and TCR of all the samples
From: A Monoclinic V1-x-yTixRuyO2 Thin Film with Enhanced Thermal-Sensitive Performance
Sample no. | VO | VTO | VTRO-1 | VTRO-2 | VTRO-3 |
|---|---|---|---|---|---|
Ti concentration (x, %) | – | 17.6 | 17.1 | 16.7 | 16.5 |
Ru concentration (y, %) | – | – | 0.65 | 1.36 | 1.87 |
Crystallite size (nm) | 25.5 | 27.6 | 24.7 | 17.2 | 12.5 |
Resistivity (at 26 °C, Ω·cm) | 13.5 | 12.8 | 6.53 | 3.14 | 1.55 |
TCR (%/°C) | − 3.13 | − 3.46 | − 3.54 | − 3.46 | − 3.47 |