Fig. 2From: Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer DepositionTGA result with chemical structure and FT-IR spectrum from 100 to 250 °C of CpZr(NMe2)3. a Chemical structure, FT-IR spectrum, b full range of 3000~700 cm−1, c range of 3000~2750 cm−1, and d range of 1300~700 cm−1Back to article page