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Fig. 1 | Nanoscale Research Letters

Fig. 1

From: A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In2O3 Nanoparticles at Room Temperature

Fig. 1

The resistive-type and FET-type gas sensors with inkjet-printed Pt-In2O3 nanoparticles. a SEM image of the resistive-type sensor platform. The inset shows magnified electrodes after forming the Pt-In2O3 sensing layer. b SEM image of the FET-type sensor with a FG aligned with a CG horizontally. c The schematic cross-sectional view along line A–A’ in b. d The schematic cross-sectional view along line B–B’ in b. The channel length and width are 2 μm and 2.4 μm, respectively

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