Fig. 6
Schematic water molecule adsorption and related energy band diagrams. a Chemisorption and physisorption layers of water molecules on Pt-In2O3 sensing material. b The energy band diagram near the interface between the ONO stack and sensing layer before RH detection. It was assumed to be at a flat band state. c The energy band diagram after RH detection. Dipoles at the interface decrease the work function of the sensing material