Fig. 5From: Broadband THz Absorption of Microbolometer Array Integrated with Split-Ring ResonatorsTHz wave absorption of periodic structures of a combination of two split-rings and an Al disk with different thicknesses (t). a Two split-rings have a ring width of 1 μm, an opening width of 2 μm and an outer radius of 17 μm and 15 μm, respectively. The Al disk has a radius of 13 μm. b Two split-rings have a ring width of 2 μm, an opening width of 2 μm and an outer radius of 17 μm and 13 μm, respectively. The Al disk has a radius of 9 μmBack to article page