Sensitive Cross-Linked SnO2:NiO Networks for MEMS Compatible Ethanol Gas Sensors

Table 1 Comparison of the sensing performance between the current work with previously reported results

No.	Sensing element	Method of preparation	Ethanol (ppm)	Op.tem. (°C)	Response^a	Ref.
1	Nanocomposite core–shell Ag@SnO₂	Chemical solution route followed by calcination	200	25	2.24	[49]
2	1.00 wt.% La₂O₃ and 99.00 wt.% Sb-doped SnO₂ (Sb-SnO₂)	Chemical solution route followed by calcination	100	200	16	[23]
3	Pd-doped SnO₂ hollow microcubes	Two step Chemical solution route and calcination	200	300	90	[50]
4	Nanorods ZnO backbone and SnO₂ branches	One-step hydrothermal method	100	275	18.1	[47]
5	Au–SnO₂ nanocomposites	Dip pen nanolithography, deposit on a MEMS platform	1000	375	28	[38]
6	Ni-doped SnO₂	One-step hydrothermal method	100	260	28.9	[19]
7	ZnO nanowires grown on a CMOS microhotplate	Hydrothermal method	809	400	2	[51]
8	Horseshoe-shaped SnO₂ with annulus like mesoporous	Self-assembly method	100	225	17.3	[52]
9	ZnO tetrapods	Thermal evaporation and controlled oxidation; deposit on a microheater through a PDMS mask	50	400	30	[37]
10	Cross-linked SnO₂:NiO network	Magnetic sputtering on etched PS microsphere templates	50	300	9	This work