Fig. 7From: Analysis of perovskite oxide etching using argon inductively coupled plasmas for photonics applicationsHigh resolution spectra for as-deposited and etched Z-cut LN, X-cut LN and BTO samples. a to d represent the Li, Nb, O, Ar for Z-cut LN. e–h represent the Li, Nb, O, Ar for X-cut LN. i to l represent the Ba, Ti, O, Ar for BTO. Bottom (red) and top (black) lines represent the as-deposited and etched results in every single pictureBack to article page