From: Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon
Parameters
Experiments [42, 43]
Classic model [22, 36, 44]
Modified model
Vibration amplitude
> 500 nm
< 5 nm
40 nm
Nominal DOC
~ 100 nm
Nominal cutting speed
~ 0.01 m/s
> 50 m/s
3.125 m/s
Vibration frequency
~ 50 kHz
> 10 GHz
500 MHz
