Table 3 The adopted HZO parameters which have been calibrated with the measured data [28]
FE Parameter | Value |
---|---|
Pr (mC/cm2) | 0.307 |
EC (MV/cm) | 0.185 |
εr | 16.38 |
α (cm/F) | − 5.80 × 1010 |
β (cm5/F2) | 3.286 × 1019 |
γ (cm9/F4) | 2.165 × 1028 |
FE Parameter | Value |
---|---|
Pr (mC/cm2) | 0.307 |
EC (MV/cm) | 0.185 |
εr | 16.38 |
α (cm/F) | − 5.80 × 1010 |
β (cm5/F2) | 3.286 × 1019 |
γ (cm9/F4) | 2.165 × 1028 |