Fig. 3

Atomic displacement diagram of nanoindentation a the fourth indentation of Single-indenter with feed = 5 nm, b the fifth indentation of Single-indenter with feed = 5 nm, c the sixth indentation of Single-indenter with feed = 5 nm, d the fourth indentation of Single-indenter with feed = 10 nm, e the fifth indentation of Single-indenter with feed = 10 nm, f the sixth indentation of Single-indenter with feed = 10 nm, g the multi-indenter indentation with feed = 5 nm, f the multi-indenter indentation with feed = 10 nm